Bulk Gases     Electronic Specialty Gases     Ultra- High Purity Equipment / TRiMEGA  
    Air Products Electronic Chemicals (APEC)    MEGASYS™     Analytical Services   
   
 
   

Providing a full line of standard and customised technical services for the semiconductor industry.

 
   
Analytical Technical Services Group

commissions newly installed UHP backpad and in-fab
gas distribution systems.
performs APIMS analysis at the backpad and in the
fabrication facility.
analyses for particle impurities in all bulk gases.

 
Customer Applications Group

Works closely with IC and OEM manufacturers on
process
effluent characterisation.
Actively involved with process optimisation of PFC
chamber cleans, focusing on NF3 and C2F6.
Works closely with OEM suppliers to determine the
relationship of gas purity and process tool performance.

 
  Printing Instructions
   
 
Would you like more information? tell me more
   
Copyright© 1996–2008 by Air Products and Chemicals, Inc.
 
  | Your Business | Products | Services | Corporate Overview | Careers | What´s New | airproducts.com | APDirect | Home |
  | tell me more | Site Map |